Ebook: Ceramic Thick Films for MEMS and Microdevices

Content:
Front Matter, Pages ii-iii
Copyright, Page iv
Preface, Page xiii
Acknowledgments, Page xv
Introduction, Pages xvii-xviii
Chapter 1 - Integration and devices: What type of structures are required for thick-film devices, why is it difficult to make them, and how can the challenges be overcome?, Pages 1-33
Chapter 2 - Routes to thick films: What is a thick film? How is it made?, Pages 35-61
Chapter 3 - Thick-film deposition techniques: How to make thick films – the processing techniques used to create films, Pages 63-83
Chapter 4 - Microstructure–property relationships: How the microstructure of the film affects its properties, Pages 85-112
Chapter 5 - Patterning: How to go from a coating to a shape, Pages 113-143
Chapter 6 - Houston, we have a problem: How to fix it when it all goes wrong, Pages 145-166
Chapter 7 - Recipes: Let’s get cooking!, Pages 167-181
Bibliography, Pages 183-185
Index, Pages 187-191