Ebook: Smart Sensors and MEMS
- Tags: Engineering general, Electronics and Microelectronics Instrumentation
- Series: NATO Science Series 181
- Year: 2004
- Publisher: Springer Netherlands
- Edition: 1
- Language: English
- pdf
The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.
It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.
The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.
The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.
It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.
The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.
The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.
It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.
The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.
Content:
Front Matter....Pages i-xv
Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art....Pages 1-50
Novel Conversion Methods for Self-Adaptive Smart Sensors....Pages 51-90
Resonant Piezoelectric Devices as Physical and Biochemical Sensors....Pages 91-123
Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films....Pages 125-154
Wireless Passive SAW Identification Marks and Sensors....Pages 155-202
Precise Vectorial Magnetic Sensors....Pages 203-228
Micro-Hall Magnetic Sensors: Physics, Technologies and Applications....Pages 229-253
Modern Silicon-based MEMS Technology....Pages 255-272
Porous Silicon: Technology and Applications for Micromachining and MEMS....Pages 273-288
Thermal Design of Microelectronics Systems....Pages 289-329
Chemical and Biological Sensors Based on Microcantilevers....Pages 331-379
Uncooled Infrared MEMS Detectors....Pages 381-419
Bulk Acoustic Wave Sensors in Chemical Analysis....Pages 421-445
Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems....Pages 447-474
Back Matter....Pages 475-480