Ebook: Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices

CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This book presents the latest developments and technological innovations in the field, making cutting-edge R&D accessible to the wider engineering community. Most of the applications of these processes are kept as confidential as possible (proprietary information), and specific details are not seen in professional or technical journals and magazines. This book makes these processes and applications accessible to a wider industrial and academic audience. Building on the fundamentals of tribology, the science of friction, wear and lubrication, the authors explore the practical applications of CMP and polishing across various market sectors. Due to the high pace of development of the electronics and semiconductors industry, many of the presented processes and applications come from these industries.
Content:
Front Matter
• Preface
• Table of Contents
1. Introduction
2. Details of the Fabrication Process for Devices with a Silicon Crystal Substrate
3. The Current Situation in Ultra-Precision Technology - Silicon Single Crystals as an Example
4. Applications of Ultra-Precision CMP in Device Processing
5. Promising Future Processing Technology
6. Progress of the Semiconductor and Silicon Industries - Growing Semiconductor Markets and Production Areas
• 7. Summary - The Future of CMP/Polishing Technologies
Index