Ebook: LIGA and Its Applications

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.
Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.Content:
Chapter 1 Introduction: LIGA and Its Applications (pages 1–10): Prof. Dr. Volker Saile
Chapter 2 X?Ray Masks for LIGA Microfabrication (pages 11–50): Yohannes Desta and Jost Goettert
Chapter 3 Innovative Exposure Techniques for 3D Microfabrication (pages 51–68): Naoki Matsuzuka and Prof. Dr. Osamu Tabata
Chapter 4 Hot Embossing of LIGA Microstructures (pages 69–102): Mathias Heckele and Matthias Worgull
Chapter 5 Exposure and Development Simulation for Deep X?Ray LIGA (pages 103–142): Prof. Dr. Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai and Pascal Meyer
Chapter 6 Design for LIGA and Safe Manufacturing (pages 143–188): Ulrich Gengenbach, Ingo Sieber and Prof. Dr. Ulrike Wallrabe
Chapter 7 Commercialization of LIGA (pages 189–203): Ron A. Lawes
Chapter 8 Polymer Optics and Optical MEMS (pages 205–232): Jurgen Mohr
Chapter 9 Refractive X?Ray Lenses Produced by X?Ray Lithography (pages 233–242): Arndt Last
Chapter 10 RF Applications (pages 243–280): Sven Achenbach and David M. Klymyshyn
Chapter 11 Evolution of the Microspectrometer (pages 281–296): Reiner Wechsung, Sven Schonfelder and Andreas Decker
Chapter 12 Actuator Manufacture with LIGA Processes (pages 297–321): Todd Christenson
Chapter 13 Development of Microfluidic Devices Created via the LIGA Process (pages 323–335): Masaya Kurokawa
Chapter 14 Application of Inspection Devices (pages 337–349): Yoshihiro Hirata
Chapter 15 The Micro Harmonic Drive Gear (pages 351–394): Reinhard Degen and Rolf Slatter
Chapter 16 Microinjection Molding Machines (pages 395–414): Christian Gornik
Chapter 17 Filled Resist Systems (pages 415–441): Thomas Hanemann, Claas Muller and Michael Schulz
Chapter 18 Dramatic Downsizing of Soft X?Ray Synchrotron Light Source from Compact to Tabletop (pages 443–452): Hironari Yamada, Norio Toyosugi, Dorian Minkov and Yoshiko Okazaki
Chapter 19 PTFE Photo?Fabrication by Synchrotron Radiation (pages 453–468): Takanori Katoh and Yanping Zhang