Ebook: Ellipsometry at the Nanoscale
- Tags: Nanotechnology and Microengineering, Measurement Science and Instrumentation, Characterization and Evaluation of Materials, Nanotechnology
- Year: 2013
- Publisher: Springer-Verlag Berlin Heidelberg
- Edition: 1
- Language: English
- pdf
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Content:
Front Matter....Pages i-xxiv
A Brief History and State of the Art of Ellipsometry....Pages 1-30
Advanced Mueller Ellipsometry Instrumentation and Data Analysis....Pages 31-143
Data Analysis for Nanomaterials: Effective Medium Approximation, Its Limits and Implementations....Pages 145-178
Relationship Between Surface Morphology and Effective Medium Roughness....Pages 179-202
Plasmonics and Effective-Medium Theory....Pages 203-224
Thin Films of Nanostructured Noble Metals....Pages 225-256
Spectroscopic Ellipsometry on Metallic Gratings....Pages 257-311
Ellipsometry at the Nanostructure....Pages 313-323
Spectroscopic Ellipsometry and Magneto-Optical Kerr Spectroscopy of Magnetic Garnet Thin Films Incorporating Plasmonic Nanoparticles....Pages 325-339
Generalized Ellipsometry Characterization of Sculptured Thin Films Made by Glancing Angle Deposition....Pages 341-410
THz Generalized Ellipsometry Characterization of Highly-Ordered Three-Dimensional Nanostructures....Pages 411-428
Infrared Ellipsometric Investigations of Free Carriers and Lattice Vibrations in Superconducting Cuprates....Pages 429-451
Real-Time Ellipsometry for Probing Charge-Transfer Processes at the Nanoscale....Pages 453-491
Polarimetric and Other Optical Probes for the Solid–Liquid Interface....Pages 493-527
Spectroscopic Ellipsometry for Functional Nano-Layers of Flexible Organic Electronic Devices....Pages 529-556
Spectroscopic Ellipsometry of Nanoscale Materials for Semiconductor Device Applications....Pages 557-581
Ellipsometry of Semiconductor Nanocrystals....Pages 583-606
Spectroscopic Ellipsometry for Inline Process Control in the Semiconductor Industry....Pages 607-627
Thin Film Applications in Research and Industry Characterized by Spectroscopic Ellipsometry....Pages 629-667
Ellipsometry and Correlation Measurements....Pages 669-703
Nanotechnology: Applications and Markets, Present and Future....Pages 705-730
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Content:
Front Matter....Pages i-xxiv
A Brief History and State of the Art of Ellipsometry....Pages 1-30
Advanced Mueller Ellipsometry Instrumentation and Data Analysis....Pages 31-143
Data Analysis for Nanomaterials: Effective Medium Approximation, Its Limits and Implementations....Pages 145-178
Relationship Between Surface Morphology and Effective Medium Roughness....Pages 179-202
Plasmonics and Effective-Medium Theory....Pages 203-224
Thin Films of Nanostructured Noble Metals....Pages 225-256
Spectroscopic Ellipsometry on Metallic Gratings....Pages 257-311
Ellipsometry at the Nanostructure....Pages 313-323
Spectroscopic Ellipsometry and Magneto-Optical Kerr Spectroscopy of Magnetic Garnet Thin Films Incorporating Plasmonic Nanoparticles....Pages 325-339
Generalized Ellipsometry Characterization of Sculptured Thin Films Made by Glancing Angle Deposition....Pages 341-410
THz Generalized Ellipsometry Characterization of Highly-Ordered Three-Dimensional Nanostructures....Pages 411-428
Infrared Ellipsometric Investigations of Free Carriers and Lattice Vibrations in Superconducting Cuprates....Pages 429-451
Real-Time Ellipsometry for Probing Charge-Transfer Processes at the Nanoscale....Pages 453-491
Polarimetric and Other Optical Probes for the Solid–Liquid Interface....Pages 493-527
Spectroscopic Ellipsometry for Functional Nano-Layers of Flexible Organic Electronic Devices....Pages 529-556
Spectroscopic Ellipsometry of Nanoscale Materials for Semiconductor Device Applications....Pages 557-581
Ellipsometry of Semiconductor Nanocrystals....Pages 583-606
Spectroscopic Ellipsometry for Inline Process Control in the Semiconductor Industry....Pages 607-627
Thin Film Applications in Research and Industry Characterized by Spectroscopic Ellipsometry....Pages 629-667
Ellipsometry and Correlation Measurements....Pages 669-703
Nanotechnology: Applications and Markets, Present and Future....Pages 705-730
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