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Ebook: X-Ray Spectrometry in Electron Beam Instruments

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From its early days in the 1950s, the electron microanalyzer has offered two principal ways of obtaining x-ray spectra: wavelength dispersive spectrometry (WDS), which utilizes crystal diffraction, and energy dispersive spectrometry (EDS), in which the x-ray quantum energy is measured directly. In general, WDS offers much better peak separation for complex line spectra, whereas EDS gives a higher collection efficiency and is easier and cheaper to use. Both techniques have undergone major transformations since those early days, from the simple focusing spectrometerand gas proportional counter of the 1950s to the advanced semiconductor detectors and programmable spectrometersoftoday. Becauseofthesedevelopments, thecapabilities and relative merits of EDS and WDS techniques have been a recurring feature of microprobeconferences for nearly40 years, and this volume bringstogetherthepapers presented at the Chuck Fiori Memorial Symposium, held at the Microbeam Analysis Society Meeting of 1993. Several themes are apparent in this rich and authoritative collection of papers, which have both a historical and an up-to-the-minute dimension. Light element analysis has long been a goal of microprobe analysts since Ray Dolby first detected K radiation with a gas proportional counter in 1960. WDS techniques (using carbon lead stearate films) were not used for this purpose until four years later. Now synthetic multilayers provide the best dispersive elements for quantitative light element analy­ sis-still used in conjunction with a gas counter.








Content:
Front Matter....Pages i-xviii
The Development of Energy Dispersive Electron Probe Analysis....Pages 1-6
Problems and Trends in X-Ray Detector Design for Microanalysis....Pages 7-19
Current Trends in Si(Li) Detector Windows for Light Element Analysis....Pages 21-31
Germanium X-Ray Detectors....Pages 33-51
Modeling the Energy Dispersive X-Ray Detector....Pages 53-65
The Effect of Detector Dead Layers on Light Element Detection....Pages 67-81
Energy Dispersive X-Ray Spectrometry in Ultra-high Vacuum Environments....Pages 83-99
Quantifying Benefits of Resolution and Count Rate in EDX Microanalysis....Pages 101-126
Improving EDS Performance with Digital Pulse Processing....Pages 127-157
A Study of Systematic Errors in Multiple Linear Regression Peak Fitting Using Generated Spectra....Pages 159-166
Artifacts in Energy Dispersive X-Ray Spectrometry in Electron Beam Instruments. Are Things Getting Any Better?....Pages 167-201
Characterizing an Energy Dispersive Spectrometer on an Analytical Electron Microscope....Pages 203-219
Wavelength Dispersive Spectrometry: A Review....Pages 221-238
Synthetic Multilayer Crystals for EPMA of Ultra-light Elements....Pages 239-257
A von Hamos-Type Parallel Collection Wavelength Dispersive Spectrometer for Microbeam Analysis....Pages 259-273
Fitting Wavelength Dispersive Spectra with the NIST/NIH DTSA Program....Pages 275-285
Application of Layered Synthetic Microstructure Crystals to WDX Microanalysis of Ultra-light Elements....Pages 287-303
An Evaluation of Quantitative Electron Probe Methods....Pages 305-367
Back Matter....Pages 369-372



Content:
Front Matter....Pages i-xviii
The Development of Energy Dispersive Electron Probe Analysis....Pages 1-6
Problems and Trends in X-Ray Detector Design for Microanalysis....Pages 7-19
Current Trends in Si(Li) Detector Windows for Light Element Analysis....Pages 21-31
Germanium X-Ray Detectors....Pages 33-51
Modeling the Energy Dispersive X-Ray Detector....Pages 53-65
The Effect of Detector Dead Layers on Light Element Detection....Pages 67-81
Energy Dispersive X-Ray Spectrometry in Ultra-high Vacuum Environments....Pages 83-99
Quantifying Benefits of Resolution and Count Rate in EDX Microanalysis....Pages 101-126
Improving EDS Performance with Digital Pulse Processing....Pages 127-157
A Study of Systematic Errors in Multiple Linear Regression Peak Fitting Using Generated Spectra....Pages 159-166
Artifacts in Energy Dispersive X-Ray Spectrometry in Electron Beam Instruments. Are Things Getting Any Better?....Pages 167-201
Characterizing an Energy Dispersive Spectrometer on an Analytical Electron Microscope....Pages 203-219
Wavelength Dispersive Spectrometry: A Review....Pages 221-238
Synthetic Multilayer Crystals for EPMA of Ultra-light Elements....Pages 239-257
A von Hamos-Type Parallel Collection Wavelength Dispersive Spectrometer for Microbeam Analysis....Pages 259-273
Fitting Wavelength Dispersive Spectra with the NIST/NIH DTSA Program....Pages 275-285
Application of Layered Synthetic Microstructure Crystals to WDX Microanalysis of Ultra-light Elements....Pages 287-303
An Evaluation of Quantitative Electron Probe Methods....Pages 305-367
Back Matter....Pages 369-372
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