Ebook: Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
- Tags: Solid State Physics and Spectroscopy
- Series: Topics in Applied Physics 52
- Year: 1983
- Publisher: Springer Berlin Heidelberg
- Language: English
- pdf
Content:
Front Matter....Pages -
Introduction and overview....Pages 1-10
Sputtering of multicomponent materials....Pages 11-90
Chemical sputtering....Pages 91-146
Sputtering by electrons and photons....Pages 147-178
Sputtering of solids with neutrons....Pages 179-229
Heavy ion sputtering induced surface topography development....Pages 231-269
Development of surface topography due to gas ion implantation....Pages 271-355
Back Matter....Pages -
Content:
Front Matter....Pages -
Introduction and overview....Pages 1-10
Sputtering of multicomponent materials....Pages 11-90
Chemical sputtering....Pages 91-146
Sputtering by electrons and photons....Pages 147-178
Sputtering of solids with neutrons....Pages 179-229
Heavy ion sputtering induced surface topography development....Pages 231-269
Development of surface topography due to gas ion implantation....Pages 271-355
Back Matter....Pages -
....
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