Ebook: Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids
- Tags: Solid State Physics and Spectroscopy
- Series: Topics in Applied Physics 47
- Year: 1981
- Publisher: Springer Berlin Heidelberg
- Language: English
- pdf
Content:
Front Matter....Pages -
Introduction and overview....Pages 1-8
Sputtering by ion bombardment theoretical concepts....Pages 9-71
Theoretical aspects of monocrystal sputtering....Pages 73-144
Sputtering yield measurements....Pages 145-218
Sputtering yields of single crystalline targets....Pages 219-256
Back Matter....Pages -
Content:
Front Matter....Pages -
Introduction and overview....Pages 1-8
Sputtering by ion bombardment theoretical concepts....Pages 9-71
Theoretical aspects of monocrystal sputtering....Pages 73-144
Sputtering yield measurements....Pages 145-218
Sputtering yields of single crystalline targets....Pages 219-256
Back Matter....Pages -
....
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