Ebook: Materials Modification by High-fluence Ion Beams

---

Content:
Front Matter....Pages i-xiv
Front Matter....Pages 1-1
High-Fluence Ion Irradiation, an Overview....Pages 3-27
Front Matter....Pages 29-29
Historical Overview on the Fundamentals of Sputtering....Pages 31-81
Depth of Origin of Sputtered Atoms....Pages 83-86
Magnetron Sputtering - Physics and Design....Pages 87-92
On the Formation and Characterization of Microcrystalline Si:H Prepared by RF Magnetron Sputtering....Pages 93-100
Depth Profiling of Ta2O5 thin Layer on Ta Foil by Ion Scattering Spectrometry and Ion Sputtering....Pages 101-108
Bombardment of Alkali and Alkali-Earth Halides by Ions and Electrons....Pages 109-115
Effects of Ar+ Angle-of-Incidence on the Etching of Si with Cl2 and Low-Energy Ar+ Ions....Pages 117-121
Irradiation Effects in Ices by Energetic Ions....Pages 123-138
Ion Formation by Very High Energetic Ion Impact on Solids....Pages 139-147
Front Matter....Pages 149-149
Computer Simulation of Stopping and Sputtering....Pages 151-184
Computer Simulation of Ion-Beam Mixing of Cobalt on Silicon....Pages 185-190
On the Fractal Nature of Collision Cascades....Pages 191-203
Simple Statistical Models for Erosion and Growth....Pages 205-214
Front Matter....Pages 215-215
Defects and Defect Processes....Pages 217-230
Fast-Ion-Induced Defects in Silicon Studied by Deep Level Transient Spectroscopy....Pages 231-236
Low Energy (300 eV - 10 keV) Ar+ and Cl+ Ion Irradiation of (100) Si....Pages 237-243
The Charge State of Iron Implanted into Sapphire....Pages 245-254
Front Matter....Pages 255-255
Direct and Recoil Implantation, and Collisional Ion-Beam Mixing: Recent Low-Temperature Experiments....Pages 257-284
Mixing by Defect-Assisted Migration of Thin Markers in Solids....Pages 285-290
Front Matter....Pages 255-255
The Triumf Optically Pumped Polarized H- Ion Source....Pages 291-294
Some High-Current Ion Sources for Materials Modification....Pages 295-301
Front Matter....Pages 303-303
Bombardment-Induced Compositional Change with Alloys, Oxides, and Oxysalts. I the Role of the Surface Binding Energy....Pages 305-327
Investigation of Preferential Sputtering Mechanisms by Analysing the Sample Surface and Near-Surface Region with AES and ISS....Pages 329-337
High-Fluence Implantation in Insulators. Part I: Compositional, Mechanical, and Optical Changes....Pages 339-356
High-Fluence Implantation in Insulators. Part II: Chemical Changes....Pages 357-383
Electrochemical and Corrosion Behaviour of Ion and Laser—Beam Modified Metal Surfaces....Pages 385-402
Front Matter....Pages 403-403
Ion—Irradiation Induced Phase Changes in Metallic Systems....Pages 405-420
The Topography of Ion-Bombarded Surfaces....Pages 421-466
Cultured Blisters....Pages 467-476
Front Matter....Pages 477-477
Electronic Properties of Ion-Implanted Metals....Pages 479-506
Front Matter....Pages 507-507
Tribology of Implantation Bilayers....Pages 509-533
Adhesive and Abrasive Wear Study of Nitrogen Implanted Steels....Pages 535-540
Effect of ?-Recoil Damage on the Elastic Moduli of Zircon and Tourmaline....Pages 541-545
Depth-Resolved Investigation of Structural Transformations and Hardness Variations in Implanted Films on Bulk Samples....Pages 547-556
Front Matter....Pages 557-557
Laser Etching as an Alternative....Pages 559-579
Pulsed Laser Irradiation of Heavily Ge Implanted Silicon....Pages 581-588
Back Matter....Pages 589-597

---

Content:
Front Matter....Pages i-xiv
Front Matter....Pages 1-1
High-Fluence Ion Irradiation, an Overview....Pages 3-27
Front Matter....Pages 29-29
Historical Overview on the Fundamentals of Sputtering....Pages 31-81
Depth of Origin of Sputtered Atoms....Pages 83-86
Magnetron Sputtering - Physics and Design....Pages 87-92
On the Formation and Characterization of Microcrystalline Si:H Prepared by RF Magnetron Sputtering....Pages 93-100
Depth Profiling of Ta2O5 thin Layer on Ta Foil by Ion Scattering Spectrometry and Ion Sputtering....Pages 101-108
Bombardment of Alkali and Alkali-Earth Halides by Ions and Electrons....Pages 109-115
Effects of Ar+ Angle-of-Incidence on the Etching of Si with Cl2 and Low-Energy Ar+ Ions....Pages 117-121
Irradiation Effects in Ices by Energetic Ions....Pages 123-138
Ion Formation by Very High Energetic Ion Impact on Solids....Pages 139-147
Front Matter....Pages 149-149
Computer Simulation of Stopping and Sputtering....Pages 151-184
Computer Simulation of Ion-Beam Mixing of Cobalt on Silicon....Pages 185-190
On the Fractal Nature of Collision Cascades....Pages 191-203
Simple Statistical Models for Erosion and Growth....Pages 205-214
Front Matter....Pages 215-215
Defects and Defect Processes....Pages 217-230
Fast-Ion-Induced Defects in Silicon Studied by Deep Level Transient Spectroscopy....Pages 231-236
Low Energy (300 eV - 10 keV) Ar+ and Cl+ Ion Irradiation of (100) Si....Pages 237-243
The Charge State of Iron Implanted into Sapphire....Pages 245-254
Front Matter....Pages 255-255
Direct and Recoil Implantation, and Collisional Ion-Beam Mixing: Recent Low-Temperature Experiments....Pages 257-284
Mixing by Defect-Assisted Migration of Thin Markers in Solids....Pages 285-290
Front Matter....Pages 255-255
The Triumf Optically Pumped Polarized H- Ion Source....Pages 291-294
Some High-Current Ion Sources for Materials Modification....Pages 295-301
Front Matter....Pages 303-303
Bombardment-Induced Compositional Change with Alloys, Oxides, and Oxysalts. I the Role of the Surface Binding Energy....Pages 305-327
Investigation of Preferential Sputtering Mechanisms by Analysing the Sample Surface and Near-Surface Region with AES and ISS....Pages 329-337
High-Fluence Implantation in Insulators. Part I: Compositional, Mechanical, and Optical Changes....Pages 339-356
High-Fluence Implantation in Insulators. Part II: Chemical Changes....Pages 357-383
Electrochemical and Corrosion Behaviour of Ion and Laser—Beam Modified Metal Surfaces....Pages 385-402
Front Matter....Pages 403-403
Ion—Irradiation Induced Phase Changes in Metallic Systems....Pages 405-420
The Topography of Ion-Bombarded Surfaces....Pages 421-466
Cultured Blisters....Pages 467-476
Front Matter....Pages 477-477
Electronic Properties of Ion-Implanted Metals....Pages 479-506
Front Matter....Pages 507-507
Tribology of Implantation Bilayers....Pages 509-533
Adhesive and Abrasive Wear Study of Nitrogen Implanted Steels....Pages 535-540
Effect of ?-Recoil Damage on the Elastic Moduli of Zircon and Tourmaline....Pages 541-545
Depth-Resolved Investigation of Structural Transformations and Hardness Variations in Implanted Films on Bulk Samples....Pages 547-556
Front Matter....Pages 557-557
Laser Etching as an Alternative....Pages 559-579
Pulsed Laser Irradiation of Heavily Ge Implanted Silicon....Pages 581-588
Back Matter....Pages 589-597
....