Ebook: VLSI Technology: Fundamentals and Applications
- Tags: Electronics and Microelectronics Instrumentation, Special Purpose and Application-Based Systems
- Series: Springer Series in Electrophysics 12
- Year: 1986
- Publisher: Springer-Verlag Berlin Heidelberg
- Edition: 1
- Language: English
- pdf
Content:
Front Matter....Pages I-XIV
Introduction....Pages 1-7
Electron Beam Lithography....Pages 8-120
Pattern Replication Technology....Pages 121-171
Mask Inspection Technology....Pages 172-192
Crystal Technology....Pages 193-270
Process Technology....Pages 271-325
Fundamentals of Test and Evaluation....Pages 326-349
Basic Device Technology....Pages 350-426
Back Matter....Pages 427-450
Content:
Front Matter....Pages I-XIV
Introduction....Pages 1-7
Electron Beam Lithography....Pages 8-120
Pattern Replication Technology....Pages 121-171
Mask Inspection Technology....Pages 172-192
Crystal Technology....Pages 193-270
Process Technology....Pages 271-325
Fundamentals of Test and Evaluation....Pages 326-349
Basic Device Technology....Pages 350-426
Back Matter....Pages 427-450
....
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