Ebook: The Physics and Fabrication of Microstructures and Microdevices: Proceedings of the Winter School Les Houches, France, March 25–April 5, 1986

les Houches This Winter School on "The Physics and Fabrication of Microstructures" originated with a European industrial decision to investigate in some detail the potential of custom-designed microstructures for new devices. Beginning in 1985, GEC and THOMSON started a collaboration on these subjects, supported by an ESPRIT grant from the Commission of the European Com­ munity. To the outside observer of the whole field, it appears clear that the world effort is very largely based in the United States and Japan. It also appears that cooperation and dissemination of results are very well organised outside Europe and act as a major influence on the development of new concepts and devices. In Japan, a main research programme of the Research and Development for Basic Technology for Future Industries is focused on "Future Electron Devices". In Japan and in the United States, many workshops are organised annually in order to bring together the major specialists in industry and academia, allowing fast dissemination of advances and contacts for setting up cooperative efforts.

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Content:
Front Matter....Pages I-XI
Front Matter....Pages 1-1
High Resolution Lithography (Some Comments on Limits and Future Possibilities)....Pages 2-14
Submicron Lithography Tools....Pages 15-35
Electron Beam Nanolithography....Pages 36-50
The Spin Coating Process Mechanism....Pages 51-58
Resists Patterning....Pages 59-64
Dry Etching: Concepts, Methods and Applications....Pages 65-82
Overlayers....Pages 83-93
Self-Aligned Growth of Microstructures....Pages 94-108
Laser-Induced Growth of Microstructures....Pages 109-120
Structural Characterization of Superlattices by X-Ray Diffraction....Pages 121-135
Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces....Pages 136-149
Fabrication of Small Structures of Semiconductors and Metals....Pages 150-157
Atomically Controlled Growth in 2, 1 and OD, and Applications....Pages 158-165
Microstructure of Organic Mono- and Multilayers....Pages 166-172
Front Matter....Pages 173-173
Fundamentals of Low Dimensional Physics....Pages 174-196
Electron States in Semiconductor Microstructures....Pages 197-209
Quantum Transport Theory for Small-Geometry Structures....Pages 210-230
Noise in Microstructures....Pages 231-254
Transport Physics of Multicontact Si MOS Nanostructures....Pages 255-265
1D Structures — Field Confinement Approach....Pages 266-279
Front Matter....Pages 173-173
Excitons in GaAs Quantum Wells: Interface Disorder and Mobility....Pages 280-288
Nonlinear Optics and Electro-Optics of Quantum Wells....Pages 289-302
Quantum Interference Effects in Small Systems: Normal and Superconducting Networks....Pages 303-322
2D Localisation and Interaction Effects in Semiconductor Structures....Pages 323-330
Optical Nonlinearities in Small Particles and Composite Materials....Pages 331-342
Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers in the Presence of an Applied Magnetic Field....Pages 343-350
Front Matter....Pages 351-351
Scaling Limits of Silicon VLSI Technology....Pages 352-369
Three Part Series on Heterojunction Transistors....Pages 370-393
CAD: Overview and Perspectives....Pages 394-417
Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics....Pages 418-424
The Metal Base Transistors....Pages 425-434
An Integrated Microfabrication System for Low-Dimensionality Structures and Devices....Pages 435-442
Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes....Pages 443-452
Electronic Neural Computing....Pages 453-460
Front Matter....Pages 461-461
Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure....Pages 462-462
Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography....Pages 462-462
2D Josephson Junction Networks....Pages 462-463
Electric Field Heating of Supported and Free-Standing AuPd Fine Wires....Pages 463-463
High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers....Pages 463-464
Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode....Pages 464-464
Front Matter....Pages 461-461
Disorder and Two-Dimensional Electronic Sub-Bands....Pages 464-464
A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures....Pages 465-466
A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem....Pages 466-466
A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire....Pages 466-466
The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors....Pages 466-467
Back Matter....Pages 469-472

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Content:
Front Matter....Pages I-XI
Front Matter....Pages 1-1
High Resolution Lithography (Some Comments on Limits and Future Possibilities)....Pages 2-14
Submicron Lithography Tools....Pages 15-35
Electron Beam Nanolithography....Pages 36-50
The Spin Coating Process Mechanism....Pages 51-58
Resists Patterning....Pages 59-64
Dry Etching: Concepts, Methods and Applications....Pages 65-82
Overlayers....Pages 83-93
Self-Aligned Growth of Microstructures....Pages 94-108
Laser-Induced Growth of Microstructures....Pages 109-120
Structural Characterization of Superlattices by X-Ray Diffraction....Pages 121-135
Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces....Pages 136-149
Fabrication of Small Structures of Semiconductors and Metals....Pages 150-157
Atomically Controlled Growth in 2, 1 and OD, and Applications....Pages 158-165
Microstructure of Organic Mono- and Multilayers....Pages 166-172
Front Matter....Pages 173-173
Fundamentals of Low Dimensional Physics....Pages 174-196
Electron States in Semiconductor Microstructures....Pages 197-209
Quantum Transport Theory for Small-Geometry Structures....Pages 210-230
Noise in Microstructures....Pages 231-254
Transport Physics of Multicontact Si MOS Nanostructures....Pages 255-265
1D Structures — Field Confinement Approach....Pages 266-279
Front Matter....Pages 173-173
Excitons in GaAs Quantum Wells: Interface Disorder and Mobility....Pages 280-288
Nonlinear Optics and Electro-Optics of Quantum Wells....Pages 289-302
Quantum Interference Effects in Small Systems: Normal and Superconducting Networks....Pages 303-322
2D Localisation and Interaction Effects in Semiconductor Structures....Pages 323-330
Optical Nonlinearities in Small Particles and Composite Materials....Pages 331-342
Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers in the Presence of an Applied Magnetic Field....Pages 343-350
Front Matter....Pages 351-351
Scaling Limits of Silicon VLSI Technology....Pages 352-369
Three Part Series on Heterojunction Transistors....Pages 370-393
CAD: Overview and Perspectives....Pages 394-417
Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics....Pages 418-424
The Metal Base Transistors....Pages 425-434
An Integrated Microfabrication System for Low-Dimensionality Structures and Devices....Pages 435-442
Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes....Pages 443-452
Electronic Neural Computing....Pages 453-460
Front Matter....Pages 461-461
Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure....Pages 462-462
Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography....Pages 462-462
2D Josephson Junction Networks....Pages 462-463
Electric Field Heating of Supported and Free-Standing AuPd Fine Wires....Pages 463-463
High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers....Pages 463-464
Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode....Pages 464-464
Front Matter....Pages 461-461
Disorder and Two-Dimensional Electronic Sub-Bands....Pages 464-464
A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures....Pages 465-466
A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem....Pages 466-466
A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire....Pages 466-466
The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors....Pages 466-467
Back Matter....Pages 469-472
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