Ebook: Microstructuring of Glasses

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.

---

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.

---

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.
Content:
Front Matter....Pages i-xx
Silicate Glasses: A Class of Amorphous Materials....Pages 3-56
Thermodynamic Phenomena in Glass....Pages 57-71
Melting and Forming Glass Half Products for Microstructuring....Pages 73-102
Introduction to Geometrical Microstructuring....Pages 105-112
Mechanical Structuring Processes....Pages 113-137
Chemical and Complex Structuring Processes....Pages 139-154
Thermal and Thermomechanical Structuring Processes....Pages 155-174
Microstructuring Glasses Using Lasers....Pages 175-196
Geometrical Photostructuring....Pages 197-261
Joining Methods for Glass Based Microdevices....Pages 263-278
Properties and Selected Applications of Microstructured Glass Devices....Pages 279-294
Back Matter....Pages 295-323

---

As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing the geometrical microstructure of glasses by mechanical, chemical, thermal, optical, and electrical treatment, and the methods and equipment required to produce actual microdevices.
Content:
Front Matter....Pages i-xx
Silicate Glasses: A Class of Amorphous Materials....Pages 3-56
Thermodynamic Phenomena in Glass....Pages 57-71
Melting and Forming Glass Half Products for Microstructuring....Pages 73-102
Introduction to Geometrical Microstructuring....Pages 105-112
Mechanical Structuring Processes....Pages 113-137
Chemical and Complex Structuring Processes....Pages 139-154
Thermal and Thermomechanical Structuring Processes....Pages 155-174
Microstructuring Glasses Using Lasers....Pages 175-196
Geometrical Photostructuring....Pages 197-261
Joining Methods for Glass Based Microdevices....Pages 263-278
Properties and Selected Applications of Microstructured Glass Devices....Pages 279-294
Back Matter....Pages 295-323
....