Ebook: Alternative Lithography: Unleashing the Potentials of Nanotechnology
- Tags: Applied Ecology, Characterization and Evaluation of Materials, Optical and Electronic Materials, Physical Chemistry
- Series: Nanostructure Science and Technology
- Year: 2003
- Publisher: Springer US
- Edition: 1
- Language: English
- pdf
Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.
This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters state-of-the-art technologies and the prospects for micro-contact printing and nanoimprint lithography.
This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters state-of-the-art technologies and the prospects for micro-contact printing and nanoimprint lithography.
Content:
Front Matter....Pages i-xxi
Alternative Lithography....Pages 1-14
Nanoimprint Lithography....Pages 15-23
Viscoelastic Properties of Polymers....Pages 25-45
Nanorheology....Pages 47-76
Wafer Scale Nanoimprint Lithography....Pages 77-101
Step and Stamp Imprint Lithography....Pages 103-115
Step and Flash Imprint Lithography....Pages 117-137
Using PDMS as a thermocurable resist for a mold assisted imprint process....Pages 139-165
Molecules for Microcontact Printing....Pages 167-180
Microcontact Printing Techniques....Pages 181-212
Local Oxidation Nanolithography....Pages 213-233
Combined Approaches for Nanoelectronic Device Fabrication....Pages 235-248
Application of Nanoimprint Lithography in Magnetism....Pages 249-270
Application of Microcontact Printing and Nanoimprint Lithography....Pages 271-285
Optical Applications of Nanoimprint Lithography....Pages 287-296
Biotechnology Applications of NIL....Pages 297-303
Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis....Pages 305-330
Back Matter....Pages 331-333
This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters state-of-the-art technologies and the prospects for micro-contact printing and nanoimprint lithography.
Content:
Front Matter....Pages i-xxi
Alternative Lithography....Pages 1-14
Nanoimprint Lithography....Pages 15-23
Viscoelastic Properties of Polymers....Pages 25-45
Nanorheology....Pages 47-76
Wafer Scale Nanoimprint Lithography....Pages 77-101
Step and Stamp Imprint Lithography....Pages 103-115
Step and Flash Imprint Lithography....Pages 117-137
Using PDMS as a thermocurable resist for a mold assisted imprint process....Pages 139-165
Molecules for Microcontact Printing....Pages 167-180
Microcontact Printing Techniques....Pages 181-212
Local Oxidation Nanolithography....Pages 213-233
Combined Approaches for Nanoelectronic Device Fabrication....Pages 235-248
Application of Nanoimprint Lithography in Magnetism....Pages 249-270
Application of Microcontact Printing and Nanoimprint Lithography....Pages 271-285
Optical Applications of Nanoimprint Lithography....Pages 287-296
Biotechnology Applications of NIL....Pages 297-303
Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis....Pages 305-330
Back Matter....Pages 331-333
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