Ebook: Feedback Control of MEMS to Atoms
- Tags: Control Robotics Mechatronics, Electronics and Microelectronics Instrumentation, Vibration Dynamical Systems Control, Nanotechnology
- Year: 2012
- Publisher: Springer US
- Edition: 1
- Language: English
- pdf
Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.
Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book:
- Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can
- Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others
- Covers specific applications and the importance of controls in the use of MEMSActuators, Nanomanipulation, Micro Flow Control, and Micro-Scale Inertial Sensors
Feedback Control of MEMS to Atoms is an ideal book for control systems researchers interested in pursuing new application in the micro- and nanoscale domains, and researchers developing micro- and nanosystems that are interested in learning how control systems can benefit their work.
Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book:
- Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can
- Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others
- Covers specific applications and the importance of controls in the use of MEMSActuators, Nanomanipulation, Micro Flow Control, and Micro-Scale Inertial Sensors
Feedback Control of MEMS to Atoms is an ideal book for control systems researchers interested in pursuing new application in the micro- and nanoscale domains, and researchers developing micro- and nanosystems that are interested in learning how control systems can benefit their work.
Content:
Front Matter....Pages i-viii
Introduction....Pages 1-6
Feedback Control of Particle Size Distribution in Nanoparticle Synthesis and Processing....Pages 7-44
In Situ Optical Sensing and State Estimation for Control of Surface Processing....Pages 45-67
Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles....Pages 69-108
Atomic Force Microscopy: Principles and Systems Viewpoint Enabled Methods....Pages 109-139
Feedback Control of Optically Trapped Particles....Pages 141-177
Position Control of MEMS....Pages 179-210
Dissecting Tuned MEMS Vibratory Gyros....Pages 211-267
Feedback Control of Microflows....Pages 269-319
Problems in Control of Quantum Systems....Pages 321-363
Common Threads and Technical Challenges in Controlling Micro- and Nanoscale Systems....Pages 365-375
Back Matter....Pages 377-384
Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book:
- Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can
- Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others
- Covers specific applications and the importance of controls in the use of MEMSActuators, Nanomanipulation, Micro Flow Control, and Micro-Scale Inertial Sensors
Feedback Control of MEMS to Atoms is an ideal book for control systems researchers interested in pursuing new application in the micro- and nanoscale domains, and researchers developing micro- and nanosystems that are interested in learning how control systems can benefit their work.
Content:
Front Matter....Pages i-viii
Introduction....Pages 1-6
Feedback Control of Particle Size Distribution in Nanoparticle Synthesis and Processing....Pages 7-44
In Situ Optical Sensing and State Estimation for Control of Surface Processing....Pages 45-67
Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles....Pages 69-108
Atomic Force Microscopy: Principles and Systems Viewpoint Enabled Methods....Pages 109-139
Feedback Control of Optically Trapped Particles....Pages 141-177
Position Control of MEMS....Pages 179-210
Dissecting Tuned MEMS Vibratory Gyros....Pages 211-267
Feedback Control of Microflows....Pages 269-319
Problems in Control of Quantum Systems....Pages 321-363
Common Threads and Technical Challenges in Controlling Micro- and Nanoscale Systems....Pages 365-375
Back Matter....Pages 377-384
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