Ebook: BioNanoFluidic MEMS
- Tags: Nanotechnology, Circuits and Systems, Biomedical Engineering, Engineering Fluid Dynamics, Biophysics/Biomedical Physics, Biomaterials
- Series: MEMS Reference Shelf
- Year: 2008
- Publisher: Springer US
- Edition: 1
- Language: English
- pdf
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
- BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS - BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
- BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
- BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
Content:
Front Matter....Pages I-X
Nanotechnology: Retrospect and Prospect....Pages 1-9
Synthesis of Oxide Nanostructures....Pages 11-36
Nanolithography....Pages 37-62
Nano/Microfabrication Methods for Sensors and NEMS/MEMS....Pages 63-130
Micro- and Nanomanufacturing via Molding....Pages 131-151
Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry....Pages 153-174
Stereolithography and Rapid Prototyping....Pages 175-196
Case Studies in Chemical Sensor Development....Pages 197-231
Engineered Nanopores....Pages 233-250
Engineering Biomaterial Interfaces Through Micro and Nano-Patterning....Pages 251-277
Biosensors Micro and Nano Integration....Pages 279-289
Back Matter....Pages 291-295
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
- BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
Content:
Front Matter....Pages I-X
Nanotechnology: Retrospect and Prospect....Pages 1-9
Synthesis of Oxide Nanostructures....Pages 11-36
Nanolithography....Pages 37-62
Nano/Microfabrication Methods for Sensors and NEMS/MEMS....Pages 63-130
Micro- and Nanomanufacturing via Molding....Pages 131-151
Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry....Pages 153-174
Stereolithography and Rapid Prototyping....Pages 175-196
Case Studies in Chemical Sensor Development....Pages 197-231
Engineered Nanopores....Pages 233-250
Engineering Biomaterial Interfaces Through Micro and Nano-Patterning....Pages 251-277
Biosensors Micro and Nano Integration....Pages 279-289
Back Matter....Pages 291-295
....