Ebook: Micro and Nanomanufacturing

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn:

• Manufacturing and fabrication at the micro and nanoscales
• Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors
• Producing master molds with micromachining
• The deposition of thin films, pulsed water drop machining, and nanomachining

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn:

• Manufacturing and fabrication at the micro and nanoscales
• Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors
• Producing master molds with micromachining
• The deposition of thin films, pulsed water drop machining, and nanomachining

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn:

• Manufacturing and fabrication at the micro and nanoscales
• Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors
• Producing master molds with micromachining
• The deposition of thin films, pulsed water drop machining, and nanomachining

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

Content:
Front Matter....Pages i-x
Principles of Micro- and Nanofabrication....Pages 1-54
Microfabrication Using X- ray Lithography....Pages 55-98
Manufacturing High Aspect Ratio Microstructures....Pages 99-142
Meso-Micromachining....Pages 143-190
Mechanical Micromachining....Pages 191-254
Microgrinding....Pages 255-321
Diamond Microcutting Tools....Pages 323-386
Laser Micro- and Nanofabrication....Pages 387-474
Micromachining Using Pulsed Water Droplets....Pages 475-519
Diamond Nanogrinding....Pages 521-590
Nanomachining....Pages 591-634
Micro-and Nanomanufacturing....Pages 635-685
Back Matter....Pages 687-702

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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn:

• Manufacturing and fabrication at the micro and nanoscales
• Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors
• Producing master molds with micromachining
• The deposition of thin films, pulsed water drop machining, and nanomachining

Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.

Content:
Front Matter....Pages i-x
Principles of Micro- and Nanofabrication....Pages 1-54
Microfabrication Using X- ray Lithography....Pages 55-98
Manufacturing High Aspect Ratio Microstructures....Pages 99-142
Meso-Micromachining....Pages 143-190
Mechanical Micromachining....Pages 191-254
Microgrinding....Pages 255-321
Diamond Microcutting Tools....Pages 323-386
Laser Micro- and Nanofabrication....Pages 387-474
Micromachining Using Pulsed Water Droplets....Pages 475-519
Diamond Nanogrinding....Pages 521-590
Nanomachining....Pages 591-634
Micro-and Nanomanufacturing....Pages 635-685
Back Matter....Pages 687-702
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