Ebook: Micromanufacturing and Nanotechnology
- Tags: Nanotechnology, Characterization and Evaluation of Materials, Surfaces and Interfaces Thin Films, Operating Procedures Materials Treatment
- Year: 2006
- Publisher: Springer-Verlag Berlin Heidelberg
- Edition: 1
- Language: English
- pdf
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Content:
Front Matter....Pages I-XXIII
Introduction....Pages 1-18
Principles of MEMS and MOEMS....Pages 19-44
Laser Technology in Micromanufacturing....Pages 45-61
Soft Geometrical Error Compensation Methods Using Laser Interferometer....Pages 63-81
Characterising Etching Processes in Bulk Micromachining....Pages 83-105
Features of Surface Micromachining and Wafer Bonding Process....Pages 107-130
Micromanufacturing for Document Security: Optically Variable Devices....Pages 131-169
Nanofinishing Techniques....Pages 171-195
Micro and Nanotechnology Applications for Space Micropropulsion....Pages 197-218
Carbon Nanotube Production and Applications: Basis of Nanotechnology....Pages 219-245
Carbon based Nanostructures....Pages 247-274
Molecular Logic Gates....Pages 275-297
Nanomechanical Cantilever Devices for Biological Sensors....Pages 299-321
Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication....Pages 299-355
Sculptured Thin Films....Pages 357-381
e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering....Pages 383-396
Nanolithography in the Evanescent Near Field....Pages 397-424
Nanotechnology for Fuel Cell Applications....Pages 425-440
Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique....Pages 441-452
Chemical Crosslinking in C60 Thin Films....Pages 453-462
Back Matter....Pages 463-468
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Content:
Front Matter....Pages I-XXIII
Introduction....Pages 1-18
Principles of MEMS and MOEMS....Pages 19-44
Laser Technology in Micromanufacturing....Pages 45-61
Soft Geometrical Error Compensation Methods Using Laser Interferometer....Pages 63-81
Characterising Etching Processes in Bulk Micromachining....Pages 83-105
Features of Surface Micromachining and Wafer Bonding Process....Pages 107-130
Micromanufacturing for Document Security: Optically Variable Devices....Pages 131-169
Nanofinishing Techniques....Pages 171-195
Micro and Nanotechnology Applications for Space Micropropulsion....Pages 197-218
Carbon Nanotube Production and Applications: Basis of Nanotechnology....Pages 219-245
Carbon based Nanostructures....Pages 247-274
Molecular Logic Gates....Pages 275-297
Nanomechanical Cantilever Devices for Biological Sensors....Pages 299-321
Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication....Pages 299-355
Sculptured Thin Films....Pages 357-381
e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering....Pages 383-396
Nanolithography in the Evanescent Near Field....Pages 397-424
Nanotechnology for Fuel Cell Applications....Pages 425-440
Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique....Pages 441-452
Chemical Crosslinking in C60 Thin Films....Pages 453-462
Back Matter....Pages 463-468
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