Ebook: An Introduction to Surface-Micromachining

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Content:
Front Matter....Pages i-xiii
Introduction....Pages 1-5
Front Matter....Pages 7-7
Microfabrication Processes....Pages 9-28
Micromachining Technologies....Pages 29-41
Front Matter....Pages 43-43
Microscale Physics....Pages 45-62
Mechanics....Pages 63-73
Design Rules....Pages 75-79
Non-Ideal Processes....Pages 81-92
Design Techniques....Pages 93-99
Front Matter....Pages 101-101
Electrical Components....Pages 103-113
Mechanical Components....Pages 115-134
Electrostatic Actuators....Pages 135-152
Electro-Thermal-Compliant Actuators....Pages 153-164
Raised Structures....Pages 165-173
Front Matter....Pages 175-175
PolyMUMP? Process....Pages 177-179
SUMMiT™ Process....Pages 181-182
MUSiC® Process....Pages 183-184
Back Matter....Pages 185-189

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Content:
Front Matter....Pages i-xiii
Introduction....Pages 1-5
Front Matter....Pages 7-7
Microfabrication Processes....Pages 9-28
Micromachining Technologies....Pages 29-41
Front Matter....Pages 43-43
Microscale Physics....Pages 45-62
Mechanics....Pages 63-73
Design Rules....Pages 75-79
Non-Ideal Processes....Pages 81-92
Design Techniques....Pages 93-99
Front Matter....Pages 101-101
Electrical Components....Pages 103-113
Mechanical Components....Pages 115-134
Electrostatic Actuators....Pages 135-152
Electro-Thermal-Compliant Actuators....Pages 153-164
Raised Structures....Pages 165-173
Front Matter....Pages 175-175
PolyMUMP? Process....Pages 177-179
SUMMiT™ Process....Pages 181-182
MUSiC® Process....Pages 183-184
Back Matter....Pages 185-189
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