Ebook: Perspectives, Science and Technologies for Novel Silicon on Insulator Devices

This proceedings volume contains the contributions of the speakers who attended the NATO Advanced Research Workshop on "Perspectives, Science and Technologies for Novel Silicon on Insulator Devices" held at the Sanatorium Pushcha OLema, Kyiv, th Ukraine from It" to 15 October 1998. This meeting was the second NATO Silicon on Insulator (SOl) Workshop to be held in st the Ukraine where the first meeting (Gurzuf, Crimea, 1 to 4th November 1994) focussed upon the physical and technical problems to be addressed in order to exploit the advantages of incorporating SOl materials in device and sensor technologies. On this occasion emphasis was placed upon firstly, promoting the use of SOl substrates for a range of novel device and circuit applications and secondly, addressing the economic issues of incorporating SOl processing technologies and device technologies within the framework of the resources available within the laboratories and factories of the Newly Independent States (NIS). The primary goal of both workshops has been the breaking of the barriers that inhibit closer collaboration between scientists and engineers in the NATO countries and the NIS. Indeed, it was a pleasure for attendees at the first meeting to renew acquaintances and for the first time attendees to make new contacts and enjoy the warm hospitality offered by our hosts in Kyiv. An outcome was the forging of new links and concrete proposals for future collaborations.

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This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS.
Readership: Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.

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This concise volume contains the key papers presented during the International NATO Advanced Research Workshop on Silicon on Insulator device technologies. The authors have moved beyond reporting the current state of the technology to explore wider issues, from the economic aspects incorporating SOI and related materials into circuits and systems to consideration of low temperature electronics, quantum devices and MEMS.
Readership: Postgraduate and professional engineers and researchers in the major silicon manufacturing companies, universities and research institutes.
Content:
Front Matter....Pages i-xxii
Smart-Cut® Technology: Basic Mechanisms and Applications....Pages 1-15
Polish Stop Technology for Silicon on Silicide on Insulator Structures....Pages 17-28
Homoepitaxy on Porous Silicon with a Buried Oxide Layer: Full-Wafer Scale SOI....Pages 29-46
Structural and Electrical Properties of Silicon on Isolator Structures Manufactured on FZ- and CZ-Silicon by Smart-Cut Technology....Pages 47-54
Development of Linear Sequential Lateral Solidification Technique to Fabricate Quasi-Single-Crystal Super-Thin Si Films for High-Performance Thin Film Transistor Devices....Pages 55-61
A Novel Low Cost Process for the Production of Semiconductor Polycrystalline Silicon from Recycled Industrial Waste....Pages 63-74
Tetrahedrally Bonded Amorphous Carbon for Electronic Applications....Pages 75-84
Diamond Based Silicon-on-Insulator Materials and Devices....Pages 85-96
Low-Temperature Processing of Crystalline Si Films on Glass for Electronic Applications....Pages 97-107
?-SiC on SiO2 Formed by ION Implantation and Bonding for Micromechanics Applications....Pages 109-120
Laser Recrystallized Polysilicon Layers for Sensor Application: Electrical and Piezoresistive Characterization....Pages 121-126
Optical Spectroscopy of SOI Materials....Pages 127-135
Computer Simulation of Oxygen Redistribution in SOI Structures....Pages 137-148
Electrical Instabilities in Silicon-on-Insulator Structures and Devices During Voltage and Temperature Stressing....Pages 149-161
Hydrogen as a Diagnostic Tool in Analysing SOI Structures....Pages 163-178
Back Gate Voltage Influence on the LDD SOI NMOSFET Series Resistance Extraction from 150 to 300 K....Pages 179-186
Characterization of Porous Silicon Layers Containing A Buried Oxide Layer....Pages 187-193
Total-Dose Radiation Response of Multilayer Buried Insulators....Pages 195-204
Recombination Current in Fully-Depleted SOI DIODES: Compact Model and Lifetime Extraction....Pages 205-212
Investigation of the Structural and Chemical Properties of SOI Materials by Ellipsometry....Pages 213-216
Experimental Investigation and Modeling of Coplanar Transmission Lines on SOI Technologies for RF Applications....Pages 217-223
Perspectives of Silicon-on-Insulator Technologies for Cryogenic Electronics....Pages 225-231
SOI CMOS for High-Temperature Applications....Pages 233-247
Quantum Effect Devices on SOI Substrates with an Ultrathin Silicon Layer....Pages 249-256
Wafer Bonding for Micro-ElectroMechanical Systems (MEMS)....Pages 257-268
A Comprehensive Analysis of the High-Temperature Off-State and Subthreshold Characteristics of SOI Mosfets....Pages 269-280
Influence of Silicon Film Parameters on C-V Characteristics of Partially Depleted SOI MOSFETs.....Pages 281-293
Effect of Shallow Oxide Traps on the Low-Temperature Operation of SOI Transistors....Pages 295-305
Nanoscale Wave-Ordered Structures on SOI....Pages 307-313
Thin Partial SOI Power Devices for High Voltage Integrated Circuits....Pages 315-320
Back Matter....Pages 321-327
....Pages 329-344