Ebook: Bringing Scanning Probe Microscopy up to Speed
- Tags: Optical and Electronic Materials, Surfaces and Interfaces Thin Films, Electrical Engineering, Characterization and Evaluation of Materials
- Series: Microsystems 3
- Year: 1999
- Publisher: Springer US
- Edition: 1
- Language: English
- pdf
Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented.
The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.
Content:
Front Matter....Pages i-xiii
Improving Conventional Scanning Probe Microscopes....Pages 15-22
Design of Piezoresistive Cantilevers with Integrated Actuators....Pages 23-48
Increasing the Speed of Imaging....Pages 49-80
Cantilevers with Interdigital Deflection Sensors....Pages 81-98
Operation of the Interdigital Cantilever....Pages 99-118
Cantilever Arrays....Pages 119-130
Scanning Probes for Information Storage and Retrieval....Pages 131-140
Silicon Process Flow: ZnO actuator and piezoresistive sensor....Pages 141-157
Silicon Process Flow: Interdigital Cantilever....Pages 159-167
Back Matter....Pages 169-173
Content:
Front Matter....Pages i-xiii
Improving Conventional Scanning Probe Microscopes....Pages 15-22
Design of Piezoresistive Cantilevers with Integrated Actuators....Pages 23-48
Increasing the Speed of Imaging....Pages 49-80
Cantilevers with Interdigital Deflection Sensors....Pages 81-98
Operation of the Interdigital Cantilever....Pages 99-118
Cantilever Arrays....Pages 119-130
Scanning Probes for Information Storage and Retrieval....Pages 131-140
Silicon Process Flow: ZnO actuator and piezoresistive sensor....Pages 141-157
Silicon Process Flow: Interdigital Cantilever....Pages 159-167
Back Matter....Pages 169-173
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