Ebook: Advanced MEMS packaging
Author: John H. Lau ... [et al.]
- Year: 2010
- Publisher: McGraw-Hill
- City: New York
- Edition: English
- Language: English
- pdf
Introduction to MEMS --
Advanced MEMS packaging --
Enabling technologies for advanced MEMS packaging --
Advanced MEMS wafer-level packaging --
Optical MEMS packaging : communications --
Optical MEMS packaging : bubble switch --
Optical MEMS : microbolometer packaging --
Bio-MEMS packaging --
Biosensor packaging --
Accelerometer packaging --
Radiofrequency MEMS switches --
RF MEMS tunable capacitors and tubable band-pass filters --
Advanced packaging of RF MEMS devices
Advanced MEMS packaging --
Enabling technologies for advanced MEMS packaging --
Advanced MEMS wafer-level packaging --
Optical MEMS packaging : communications --
Optical MEMS packaging : bubble switch --
Optical MEMS : microbolometer packaging --
Bio-MEMS packaging --
Biosensor packaging --
Accelerometer packaging --
Radiofrequency MEMS switches --
RF MEMS tunable capacitors and tubable band-pass filters --
Advanced packaging of RF MEMS devices
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