Ebook: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
- Genre: Physics // Plasma Physics
- Tags: Физика, Физика плазмы, Научные статьи и сборники
- Year: 1991
- Publisher: William Andrew
- Edition: 1
- Language: English
- pdf
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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