Ebook: The Science and Engineering of Microelectronic Fabrication

An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal oxidation -- Ion implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metallization -- CMOS technologies -- GaAs technologies -- Silicon bipolar technologies -- MEMS -- Integrated circuit manufacturing -- Appendix 1. Acronyms and common symbols -- Appendix 2. Properties of selected semiconductor materials -- Appendix 3. Physical constants -- Appendix 4. Conversion factors -- Appendix 5. Some properties of the error function -- Appendix 6. F values -- Appendix 7. SUPREM commands