Ebook: Microlithography: science and technology
Author: Smith Bruce W., Suzuki Kazuaki
- Tags: Integrated circuits--Masks, Manufacturing processes, Metal oxide semiconductors Complementary--Design and construction, Microlithography--Industrial applications, TECHNOLOGY / Electronics / Microelectronics, TECHNOLOGY / Lasers, Electronic books, Microlithography -- Industrial applications, Integrated circuits -- Masks, Metal oxide semiconductors Complementary -- Design and construction
- Year: 2020
- Publisher: CRC Press
- City: Boca Raton
- Edition: Third edition
- Language: English
- pdf
"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--
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