Ebook: Handbook of Vacuum Science and Technology

I did a little research before I bought this book. It turns out that it paid off - this is a great book for vacuum technology. As a designer of UHV semiconductor equipment, I would highly recommend this text. I bought one more book on the subject at the same time - this one is the better overall choice for complete coverage.

I am still looking for a reference that has tips and trick of the trade - but there is enough info in this book to point you in the right direction.