Ebook: Micro Electro Mechanical Systems
Author: Qing-An Huang
- Tags: Engineering, Mechatronics, Nanotechnology and Microengineering, Electronics and Microelectronics Instrumentation, Microwaves RF and Optical Engineering
- Series: Micro/Nano Technologies
- Year: 2018
- Publisher: Springer Singapore
- Edition: 1st ed.
- Language: English
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