Ebook: Metallic films for triggering vacuum-arc plasma sources

Статья. Опубликована в Functional materials, 21, N1, 2014 P. 47-51The results of researches on formation the conductive film on discharge gap of injector of triggering of plasma sources on base of vacuum arc are shown. The film was deposited on the end face of the tube made of ceramic, used for filling of the discharge gap of injector of triggering. The experiments were performed in the condition of real technological process of protective and decorative coating in the plasma source with magnetic confinement of the cathode spot and with the chromium and titanium cathodes. The influence of the cathode material and the conditions of deposition of coatings on the structure and properties of films obtained on ceramics of Al2O3-SiO2-BaO2 defined. A film growth rate, which varies in the range 1.1 . 3.3 nm/sec, was defined.