Ebook: Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
- Genre: Physics // Plasma Physics
- Tags: Физика, Физика плазмы
- Series: Materials science and process technology series
- Year: 1990
- Publisher: Noyes Publications
- City: Park Ridge, N.J., U.S.A
- Language: English
- djvu
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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