Ebook: Optical materials : microstructuring surfaces with off-electrode plasma
- Tags: Optical materials, Microstructure, Low temperature plasmas, TECHNOLOGY & ENGINEERING, Mechanical
- Year: 2017
- Publisher: CRC Press
- City: Boca Raton, FL
- Edition: 1
- Language: English
- pdf
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
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