Ebook: Plasma Processing of Semiconductors
- Genre: Physics // Plasma Physics
- Tags: Electrical Engineering, Manufacturing Machines Tools, Optical and Electronic Materials, Atomic Molecular Optical and Plasma Physics
- Series: NATO ASI Series 336
- Year: 1997
- Publisher: Springer Netherlands
- Edition: 1
- Language: English
- pdf
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Download the book Plasma Processing of Semiconductors for free or read online
Continue reading on any device:
Last viewed books
Related books
{related-news}
Comments (0)